Moralo oa Optical o na le lits'ebetso tse ngata tse fapaneng tšimong ea semiconductor. Ka mochine oa photolithography, tsamaiso ea optical e ikarabella ho lebisa tlhokomelo ea leseli le hlahisoang ke mohloli oa leseli le ho le hlahisa holim'a sekoahelo sa silicon ho pepesa mokhoa oa potoloho. Ka hona, moralo le ho ntlafatsa likarolo tsa optical tsamaisong ea photolithography ke mokhoa oa bohlokoa oa ho ntlafatsa ts'ebetso ea mochine oa photolithography. Tse latelang ke tse ling tsa likarolo tsa optical tse sebelisoang mochining oa photolithography:
Morero oa projeke
01 Sepheo sa khakanyo ke karolo ea bohlokoa ea optical mochining oa lithography, hangata o nang le letoto la lilense tse kenyelletsang lilense tse khorofo, lilense tse concave, le liprism.
02 Mosebetsi oa eona ke ho honyetsa mokhoa oa potoloho holim'a maske ebe o o tsepamisa holim'a sephaphatha se koahetsoeng ka photoresist.
03 Ho nepahala le ts'ebetso ea sepheo sa projeke li na le tšusumetso e tiileng mabapi le qeto le boleng ba setšoantšo sa mochini oa lithography.
Seipone
01 Liiponedi sebedisoa ho fetola tsela ya kganya le ho le lebisa sebakeng se nepahetseng.
02 Mechineng ea EUV ea lithography, liipone li bohlokoa haholo hobane leseli la EUV le monngoa habonolo ke lisebelisoa, kahoo liipone tse nang le ponahalo e phahameng li tlameha ho sebelisoa.
03 Ho nepahala ha holim'a metsi le botsitso ba pontšo e boetse e na le tšusumetso e kholo mosebetsing oa mochine oa lithography.
Lisefe
Li-filters tsa 01 li sebelisetsoa ho tlosa maqhubu a sa batleheng a khanya, ho ntlafatsa ho nepahala le boleng ba mokhoa oa photolithography.
02 Ka ho khetha filthara e nepahetseng, ho ka netefatsoa hore ke leseli feela la leqhubu le itseng le kenang mochining oa lithography, ka hona ho ntlafatsa ho nepahala le botsitso ba mokhoa oa lithography.
Prisms le likarolo tse ling
Ho phaella moo, mochine oa lithography o ka boela oa sebelisa likarolo tse ling tse thusang tsa optical, tse kang li-prism, polarizers, joalo-joalo, ho finyella litlhoko tse khethehileng tsa lithography. Khetho, moralo le tlhahiso ea likarolo tsena tsa optical li tlameha ho latela ka tieo litekanyetso le litlhoko tsa tekheniki ho netefatsa ho nepahala le ho sebetsa hantle ha mochini oa lithography.
Ka bokhutšoanyane, ts'ebeliso ea likarolo tsa optical tšimong ea mechine ea lithography e ikemiselitse ho ntlafatsa ts'ebetso le katleho ea tlhahiso ea mechine ea lithography, ka hona e tšehetsa nts'etsopele ea indasteri ea tlhahiso ea microelectronics. Ka nts'etsopele e tsoelang pele ea theknoloji ea lithography, ntlafatso le boqapi ba likarolo tsa optical le tsona li tla fana ka monyetla o moholo oa ho etsoa ha li-chips tsa moloko o latelang.
Bakeng sa lintlha tse ling le likeletso tsa litsebi, etela sebaka sa rona sa marang-rang hohttps://www.jiujonoptics.com/ho ithuta haholoanyane ka lihlahisoa tsa rona le tharollo.
Nako ea poso: Jan-02-2025
